research focus
In the OxideMEMS Lab we invent new micromechanical designs and efficient transducers to make MEMS resonators with high resonance frequency, low motional impedance, strong transducer coupling coefficient, low bias drift and large tuning range. We investigate resonator coupling mechanisms to demonstrate channel-select filters, synchronized oscillators and inertial sensors for communication, computation and navigation. We explore inter-domain coupling to design merged NEMS-CMOS, Photonic-MEMS and QEMS devices.