• home
• Research
• Publications
• People
• Resources

publications

• Eugene Hwang and Sunil A. Bhave, "PN-diode transduced 3.7 GHz silicon resonator," 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), Hong Kong, January 24-28, 2010.
• Suresh Sridaran and Sunil A. Bhave, "Silicon monolithic acousto-optic modulator," 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), Hong Kong, January 24-28, 2010.
• Tiffany J. Cheng and Sunil A. Bhave, "High-Q, low impedance polysilicon resonators with 10nm air gaps," 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010), Hong Kong, January 24-28, 2010.
• Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeff Pulskamp, Daniel Judy and Roger Kaul, "A Pb(Zr0.52Ti0.48)O3 transduced fully-differential mechanical-coupled frequency-agile filter," IEEE Electron Device Letters, October 2009.
• Dana Weinstein and Sunil A. Bhave, "Internal dielectric transduction in bulk-mode resonators," IEEE Journal of Microelectromechanical Systems, September 2009.
• Hengky Chandrahalim, Sunil A. Bhave, Christian Rembe, Sebastian Boedecker, Babak Pourat, Ronald Polcawich and Jeff Pulskamp, "Heterodyne laser-doppler interferometric characterization of contour-mode resonators above 1GHz," IEEE International Ultrasonics Symposium (Ultrasonics 2009), Rome, Italy, September 20-23, 2009.
• Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeff Pulskamp, and Roger Kaul, "PZT-transduced high-overtone width-extensional resonators above 1GHz," IEEE International Ultrasonics Symposium (Ultrasonics 2009), Rome, Italy, September 20-23, 2009.
• Dana Weinstein, Sunil A. Bhave, Shinya Morita, Shun Mitarai, and Koichi Ikeda, "Frequency scaling and transducer efficiency in internal dielectrically transduced silicon bar resonators," 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’09), Denver, Colorado, June 21-25, 2009, pp. 708-711.
• Eugene Hwang and Sunil A. Bhave, "Acoustic mismatch and its effects on internally transduced micromechanical resonators," IEEE Frequency Control Symposium (FCS 2009), Besançon, France, April 20-24, 2009, pp. 460-465.
• Kuan-Lin Chen, Hengky Chandrahalim, Andrew Graham, Sunil A. Bhave, Roger T. Howe and Thomas W. Kenny, "Epitaxial silicon microshell vacuum-encapsulated CMOS-compatible 200 MHz bulk-mode resonator," 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), Sorrento, Italy, January 25-29, 2009, pp. 23-26.
• Jeff Pulskamp, Daniel Judy, Roger Kaul, Ronald Polcawich, Hengky Chandrahalim and Sunil A. Bhave, "Monolithically integrated piezo-MEMS SP2T switch and contour-mode filters," 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), Sorrento, Italy, January 25-29, 2009, pp. 900-903.
• Hengky Chandrahalim, Sunil A. Bhave, Ronald Polcawich, Jeff Pulskamp, Daniel Judy, Roger Kaul and Madan Dubey, "Performance comparison of Pb(Zr0.52Ti0.48)O3-only and Pb(Zr0.52Ti0.48)O3-on-silicon resonators," Applied Physics Letters 93, 233504 (2008).
• Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeff Pulskamp, Dan Judy and Roger Kaul, "Fully-differential mechanically-coupled PZT-on-silicon filters," IEEE International Ultrasonics Symposium (Ultrasonics 2008), Beijing, China, November 2-5, 2008, pp. 713-716.
• Dana Weinstein and Sunil A. Bhave, "Piezoresistive sensing of a dielectrically actuated silicon bar resonator," 2008 Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2008), Hilton Head Island, South Carolina, June 1-5, 2008, pp. 368-371.
• Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeff Pulskamp, Dan Judy, Roger Kaul and Madan Dubey, "Influence of silicon on quality factor, motional impedance and tuning range of PZT-transduced resonators," 2008 Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2008), Hilton Head Island, South Carolina, June 1-5, 2008, pp. 360-363.
• Hengky Chandrahalim and Sunil A. Bhave, "Digitally-tunable MEMS filter using mechanically-coupled resonator array," 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, Arizona, January 13-17, 2008, pp. 1020-1023.
• Dana Weinstein and Sunil A. Bhave, "Internal dielectric transduction of a 4.5 GHz silicon bar resonator," IEEE International Electron Devices Meeting (IEDM 2007), Washington, DC, December 10-12, 2007, pp. 415-418.
• Dana Weinstein and Sunil A. Bhave, "Internal dielectric transduction: optimal position and frequency scaling," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, (54)12, 2696-98 (2007).
• Hengky Chandrahalim, Sunil A. Bhave, Emmanuel Quévy and Roger T. Howe, "Aqueous transduction of poly-SiGe disk resonators," 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’07), Lyon, France, June 10-14, 2007, pp. 313-316.
• Dana Weinstein, Sunil A. Bhave, Masahiro Tada, Shun Mitarai, Shinya Morita and Koichi Ikeda, "Mechanical coupling of 2D resonator arrays for MEMS filter applications," IEEE Frequency Control Symposium (FCS 2007), Geneva, Switzerland, May 29 - June 1, 2007, pp. 1362-1365.
• Hengky Chandrahalim, Dana Weinstein, Lih Feng Cheow and Sunil A. Bhave, "High-K dielectrically transduced MEMS thickness shear mode resonators and tunable channel-select RF filters," Sensors and Actuators A: Physical 136(2) 527-539 (2007).
• Lih Feng Cheow, Hengky Chandrahalim and Sunil A. Bhave, "MEMS filter with voltage-tunable center frequency and bandwidth," 2006 Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2006), Hilton Head Island, South Carolina, June 4-8, 2006, pp. 304-307.
• Dana Weinstein, Hengky Chandrahalim, Lih Feng Cheow and Sunil A. Bhave, "Dielectrically transduced single-ended to differential MEMS filter," IEEE International Solid-State Circuits Conference (ISSCC 2006), San Francisco, California, February 5-9, 2006, pp. 318-319.
• Hengky Chandrahalim, Dana Weinstein, Lih Feng Cheow and Sunil A. Bhave, "Channel-select micromechanical filters using high-K dielectrically transduced MEMS resonators," 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey, January 22-26, 2006, pp. 894-897.
• Hengky Chandrahalim, Dana Weinstein and Sunil A. Bhave, “Thickness shear mode vibrations in silicon bar resonators," IEEE International Ultrasonics Symposium (Ultrasonics 2005), Rotterdam, The Netherlands, September 18-21, 2005, pp. 898-901.

• Sunil A. Bhave and Roger T. Howe, " Silicon nitride-on-silicon bar resonator using internal electrostatic transduction," 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'05), Seoul, Korea, June 5-9, 2005, pp. 2139-2142.
• Sunil A. Bhave, Di Gao, Roya Maboudian and Roger T. Howe, " Fully-differential poly-SiC Lamé-mode resonator and checkerboard filter," 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2005), Miami, Florida, January 30 - February 3, 2005, pp. 223-226.
• Sunil A. Bhave and Roger T. Howe, " Internal electrostatic transduction for bulk-mode MEMS resonators,” 2004 Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island, South Carolina, June 6-10, 2004, pp. 59-60.
• Emmanuel P. Quévy, Sunil A. Bhave, Hideki Takeuchi, Tsu-Jae King, and Roger T. Howe, "Poly-SiGe high frequency resonators based on lithographic definition of nano-gap lateral transducers," 2004 Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island, South Carolina, June 6-10, 2004, pp. 360-363.
• Hideki Takeuchi, Emmanuel Quévy, Sunil A. Bhave, Tsu-Jae King, and Roger T. Howe, "Ge-blade damascene process for post-CMOS integration of nano-mechanical resonators," IEEE Electron Device Letters, 25, 529-532 (2004).
• Sunil A. Bhave, Joseph I. Seeger, Xuesong Jiang, Bernhard E. Boser, Roger T. Howe, and John Yasaitis, "An integrated, vertical-drive, in-plane-sense microgyroscope," 12th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'03), Boston, Massachusetts, June 8-12, 2003, pp. 171-174.
• J. Yasaitis, M. Judy, T. Brosnihan, P. Garone, N. Pokrovskiy, D. Sniderman, S. Limb, R. Howe, B. Boser, M. Palaniapan, X. Jiang, and S. Bhave, "A modular process for integrating thick polysilicon MEMS devices with sub-micron CMOS," Proceedings of SPIE, 4979, Micromachining and Microfabrication Process Technology VII, Bellingjam, Washington, January 27-29, 2003, pp. 145-154.
• Tsu-Jae King, Roger T. Howe, Marie-Ange Eyoum, and Sunil A. Bhave, "Interconnect issues for integrated MEMS technologies," (invited) Advanced Metallization Conference, San Diego, California, October 2002.
• Xuesong Jiang, Sunil A. Bhave, Joseph I. Seeger, Roger T. Howe, Bernhard E. Boser, and John Yasaitis, "Σ∆ capacitive interface for a vertically-driven X&Y-axis rate gyroscope," 28th European Solid-State Circuits Conference (ESSCIRC 2002), Florence, Italy, September 24-26, 2002, pp. 639-642.
• Sunil A. Bhave, Brian L. Bircumshaw, Yong-Sang Kim, Albert P. Pisano, Tsu-Jae King, and Roger T. Howe, "Poly-SiGe: a high-Q structural material for post-CMOS integrated RF MEMS," 2002 Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head 2002), Hilton Head Island, South Carolina, June 4-7, 2002, pp. 34-37.
• Sunil A. Bhave and Roger T. Howe, "Capacitive sensing techniques in frequency and time domain for GHz NEMS resonators," 1st International Conference and School on Nanoscale/Molecular Mechanics, Maui, Hawaii, May 12-17, 2002.
• Ashwin A. Seshia, Win Zin Low, Sunil A. Bhave, Roger T. Howe, and Stephen Montague, "Micromechanical Pierce oscillator for resonant sensing applications," Modeling and Simulation of Microsystems (MSM 2002), San Juan, Puerto Rico, April 22-25, 2002, pp. 162-165.
•  J. V. Clark, D. Bindel, N. Zhou, S. Bhave, Z. Bai, J. Demmel, K. S. J. Pister, "Sugar: advancements in a 3D multi-domain simulation package for MEMS," Microscale Systems: Mechanics and Measurements Symposium. Portland, Oregon, June 4, 2001.
• William Chen, H. John Reekie, Sunil Bhave and Edward A. Lee, "Native signal processing on the ultrasparc in the Ptolemy environment," 30th Asilomar Conference on Signals, Systems, and Computers, Pacific Grove, California, November 3-6, 1996, pp. 1368-1372.